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  CMT-SR1000N
1. Introduction  
  The CMT-SR1000N is a measurement system for Sheet Resistance and Resistivity of Wafer, LCD, ITO, Solar cell, Fuel cell samples.
Measurement is simply completed by pressing the "Measure" BUTTON only, and the measurement value is displayed on the LCD display window of the system.
 
2. Features  
Automatic contact system(Center 1 point)  
Automatic range selection    
Data communication port & software    
3. Configuration    
The system consists of the following components.    
JANDEL 4-point probe head    
Z-axis robot arm    
Membrane keyboard panel    
LCD display window    
Data communication port    
Data download Software    
Standard accessories    
- Power cable
- Data communication cable
- Operating manual
   
4. Specifications    
Sheet resistance measurement    
- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq 2 Mohm/sq
- Measuring point : Center 1 point
   
Resistivity measurement    
- Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ohmcm 200.0 kohmcm (VLSI standard wafer)
- Measuring point : Center 1 point
Current source    
- 10nA to 100mA
- DVM 0V to 2,000mV
   
Electronic accuracy    
- 0.5% (Precision resistor)    
4-point probe (Jandel Eng.)    
- Pin spacing : 20 mils 50 mils
- Pin Load : 10 gram/pin 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron
   
Software    
- Windows Version
- Data save & load
- Data printout
   
5. Specimen    
Circle type (wafer) : max 200mm    
Rectangular type : max 140140 mm    
6. Measuring time    
Approx. 2 1 sec/point    
7. Software    
Operating personal computer : IBM PC/AT compatible
Connect com port of PC and data com port of CMT-SR1000N
Data save & load    
Data printout    
8. Utility requirements    
Power requirements    
- Line voltage : AC 100 ~ 220V 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz
   
9. Outside Dimension    
254mm(W) 562mm(D) 250mm(H)    
10. Operating environment    
Temperature range : 23ơ 1C    
Relative humidity : 30 % 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
   
 
 
     
   
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103-407, 88 Sinwon-ro, Yeongtong, Suwon, Gyeonggi, 16681 Korea | Tel 82-31-695-7167