| 1. Introduction |
|
 |
| |
The CMT-SR2000N and CMT-SR2000N-PV(M2~M10)is a fully automatic system to
measure Sheet Resistance and Resistivity of Silicon
Wafer. This system can be operated by itself, furthermore,
perfect remote control is available using a PC and
exclusive software, and it gives various data analyses. |
|
| 2. Features |
|
 |
X,Y,Z-axis fully automatic system |
|
|
Auto & Manual range selection |
|
|
Systems for 8" or 140X140mm(SR2000N) |
|
|
Systems for 182X182mm (Max M10: SR2000N-PV) |
|
|
Systems for 210X210mm (Max M12: SR5000) |
|
|
Perfect remote control by operating software |
|
|
Data analysis (2D, 3D map, Data map, etc.) |
|
|
|
ASTM & SEMI quick measurement mode |
|
|
| 3. Configuration |
|
|
| |
The system consists of the following components. |
|
|
|
JANDEL 4-point probe head |
|
|
|
Z-axis robot arm |
|
|
|
Revolution sample stage chuck (X,Y-axis) |
|
|
|
Membrane keyboard panel |
|
|
|
LCD display window |
|
|
|
Remote control communication port |
|
|
|
Vacuum hose connector (200mmHg) |
|
|
|
Software (Windows Ver.) |
|
|
|
Standard accessories |
|
|
| |
- Power cable
- Remote control communication cable
- Operating manual
|
|
|
| 4. Specifications |
|
|
|
Sheet resistance measurement |
|
|
| |
- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ¡ 2 Mohm/sq
|
|
|
|
Resistivity measurement |
|
|
| |
- Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ¥ìohm¡¤cm ¡ 200.0 kohm¡¤cm
|
|
Current source |
|
|
| |
- 10nA to 100mA
- DVM 0V to 2,000mV
|
|
|
|
Electronic accuracy |
|
|
| |
- ¡¾ 0.5 % (Precision resistor) |
|
|
|
4-point probe (Jandel Eng.) |
|
|
| |
- Pin spacing : 25 mils ¡ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ¡ 250 gram/pin
- Pin radius : 12.5 micron¡500 microns (polished 2¥ì diamond)
- Tolerance : ¡¾ 0.01 mm
- Needles : Solid Tungsten Carbide ¥õ0.40 mm
|
|
Operating software |
|
|
| |
- Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data & mapping printout
|
|
Measurement mode (S/W) |
|
|
| |
-Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key |
| 5. Specimen |
|
|
|
Wafer : max 200mm & M2~M10 Solar cell |
|
|
| 6. Measuring time |
|
|
|
Approx. 2 ¡¾ 1 sec/point |
|
|
| 7. Software
[Windows ver.)] |
|
Operating personal computer : IBM PC/AT compatible PENTIUM¡ |
|
Communication port |
| 8. Utility requirements |
|
|
|
Power requirements (1 Line) |
|
|
| |
- Line voltage : AC 100 ~ 220V ¡¾ 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz
|
|
|
|
Stage chuck vacuum requirements (1 Line) |
|
|
| |
- Vacuum : About 200mmHg (1 Line)
- Vacuum hose : Urethane 4mm
|
|
|
| 9. Outside Dimension |
|
|
|
SR2000N : 254mm(W)¡¿562mm(D)¡¿250mm(H) |
|
|
|
SR2000N-PV : 330mm(W)¡¿670mm(D)¡¿330mm(H)) |
|
|
| 10. Operating environment |
|
|
|
Temperature range : 23¡Æ ¡¾ 1¡ÆC |
|
|
|
Relative humidity : 30 % ¡ 70 % |
|
|
|
Avoid placing the system near a source
of RFI, vibration and sources of gas. |
|
Avoid large changes in temperature. |
|
|
| |
|
|
|
CMT-SR2000N / SR2000N-PV(M2~M10)