Korean  
   
 
 
 
  Home > Products > SR2000N  
 
  CMT-SR2000N / CMT-SR2000N-PV(M2~M12)
1. Introduction  
  The CMT-SR2000N and CMT-SR2000N-PV(M2~M12)is a fully automatic system to measure Sheet Resistance and Resistivity of Silicon Wafer. This system can be operated by itself, furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analyses.  
2. Features  
X,Y,Z-axis fully automatic system  
Auto & Manual range selection  
Systems for 200mm wafer (CMT-SR2000N)  
Systems for 156X156mm Solar cell (PV(M2))  
Systems for 182X182mm Solar cell (PV(M10))  
Systems for 210X210mm Solar cell (PV(M12))  
Perfect remote control by operating software  
Data analysis (2D, 3D map, Data map, etc.)    
ASTM & SEMI quick measurement mode    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head    
Z-axis robot arm    
Revolution sample stage chuck (X,Y-axis)    
Membrane keyboard panel    
LCD display window    
Remote control communication port    
Vacuum hose connector (200mmHg)    
Software (Windows Ver.)    
Standard accessories    
  - Power cable
- Remote control communication cable
- Operating manual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ohmcm 200.0 kohmcm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Electronic accuracy    
  - 0.5 % (Precision resistor)    
4-point probe (Jandel Eng.)    
  - Pin spacing : 25 mils 50 mils by 5mil increments
- Pin Load : 10 gram/pin 250 gram/pin
- Pin radius : 12.5 micron500 microns (polished 2 diamond)
- Tolerance : 0.01 mm
- Needles : Solid Tungsten Carbide 0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data & mapping printout
Measurement mode (S/W)    
  -Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key
5. Specimen    
Wafer : max 200mm & M2~M12 Solar cell    
6. Measuring time    
Approx. 2 1 sec/point    
7. Software [Windows ver.)]
Operating personal computer : IBM PC/AT compatible PENTIUM
Communication port
8. Utility requirements    
Power requirements (1 Line)    
  - Line voltage : AC 100 ~ 220V 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz

   
Stage chuck vacuum requirements (1 Line)    
  - Vacuum : About 200mmHg (1 Line)
- Vacuum hose : Urethane 4mm
   
9. Outside Dimension    
SR2000N : 254mm(W)562mm(D)250mm(H)    
10. Operating environment    
Temperature range : 23 1C    
Relative humidity : 30 % 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
       
 
 
     
   
Copyright (c) 2004 AIT Co.,Ltd. All rights reserved.
103-407, 88 Sinwon-ro, Yeongtong, Suwon, Gyeonggi, 16681 Korea | Tel 82-31-695-7167