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  CMT-SR2000N / SR2000N-PV (For 200mm wafer / Solar cell)
1. Introduction  
  The CMT-SR2000N and CMT-SR2000N-PV is a fully automatic system to measure Sheet Resistance and Resistivity of Silicon Wafer. This system can be operated by itself, furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analyses.  
2. Features  
X,Y,Z-axis fully automatic system  
Auto & Manual range selection  
Systems for 200mm wafer (SR2000N-PV : 156X156mm)  
Perfect remote control by operating software  
Data analysis (2D, 3D map, Data map, etc.)    
ASTM & SEMI quick measurement mode    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head    
Z-axis robot arm    
Revolution sample stage chuck (X,Y-axis)    
Membrane keyboard panel    
LCD display window    
Remote control communication port    
Vacuum hose connector (200mmHg)    
Software (Windows Ver.)    
Standard accessories    
  - Power cable
- Remote control communication cable
- Operating manual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ohmcm 200.0 kohmcm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Electronic accuracy    
  - 0.5 % (Precision resistor)    
4-point probe (Jandel Eng.)    
  - Pin spacing : 25 mils 50 mils by 5mil increments
- Pin Load : 10 gram/pin 250 gram/pin
- Pin radius : 12.5 micron500 microns (polished 2 diamond)
- Tolerance : 0.01 mm
- Needles : Solid Tungsten Carbide 0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data & mapping printout
Measurement mode (S/W)    
  -Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key
5. Specimen    
Wafer : max 200mm(SR2000N-PV : 156X156mm)    
6. Measuring time    
Approx. 2 1 sec/point    
7. Software [Windows ver.)]
Operating personal computer : IBM PC/AT compatible PENTIUM
Communication port
8. Utility requirements    
Power requirements (1 Line)    
  - Line voltage : AC 100 ~ 220V 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz

   
Stage chuck vacuum requirements (1 Line)    
  - Vacuum : About 200mmHg (1 Line)
- Vacuum hose : Urethane 4mm
   
9. Outside Dimension    
SR2000N : 254mm(W)562mm(D)250mm(H) SR2000N-PV : 270mm(W)610mm(D)280mm(H)    
10. Operating environment    
Temperature range : 23 1C    
Relative humidity : 30 % 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
       
 
 
     
   
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