| 1. Introduction |
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The CMT-SR3000 is a measurement system
for Sheet Resistance and Resistivity of a plain
rectangle sample such as LCD, ITO, Glass, Film etc.
And it is designed to work for remote functioning
to meet automation such as automatic sample loading.
This system is designed for easy operation by a
personal computer with exclusive software, and this
software has function for various data analyses,
mapping and etc.
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| 2. Features |
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X,Y,Z-axis fully automatic system |
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Automatic range selection |
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Perfect remote control by operating software. |
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Data analysis (2D, 3D mapping etc.) |
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Glass centering nob |
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Glass unload positioning |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head |
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Bridge type X,Y,Z-axis robot |
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Sample stage for flat panel |
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LED for process signal |
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Remote control communication port |
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Power switch |
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Operating analysis software
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Standard accessories |
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- Power cable
- Remote control communication cable
- Operating manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by
4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
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Resistivity measurement |
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- Measuring method : Contacted by 4-point probe(input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 % (Precision resistor) |
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4-point probe (Jandel Eng.) |
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- Pin spacing : 25 mils ∼ 50 mils by 5mil increments.
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm |
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Operating software |
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- Measurement condition creation :
Sample size, measure point interval, test mode etc.
- Save & load : Data, Sample type, measure point etc.
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout |
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Measurement mode (S/W) |
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- Auto measurement : Point interval designation by user
- Quick measurement : 9, 13, 25 pattern quick mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow key |
| 5. Specimen |
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- Rectangle type sample size : Customer size |
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| 6. Measuring time |
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- Approx. 3 ± 1 sec/point |
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| 7. Software (Windows ver.)) |
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Operating personal computer : IBM PC/AT Compatible Pentium |
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Serial communication (RS232) |
| 8. Utility requirement |
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Power requirements |
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- Line voltage : AC 110V or 220V ±10%
- Electric power : 100 W, 500 mA
- Line frequency : 50 Hz
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Air requirements |
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- Air 1 Line : About 1 MPa (kgf/cm2) |
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System table |
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| 9. Outside Dimensions |
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SR3000S (370X470) : 650mm(W) × 900mm(D) × 350mm(H) |
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SR3000M (550X650) : 700mm(W) × 950mm(D) × 350mm(H) |
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SR3000L (600X720) : 800mm(W) ×1050mm(D) × 350mm(H) |
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SR3000C : Customer size |
| 10. Operating environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ∼ 70 % |
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- Avoid placing the system near a source of RFI, vibration and sources of gas.
- Avoid large changes in temperature. |
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CMT-SR3000 (Discontinued)