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  CMT-100S & CMT-100MP (Manual contact system)
     CMT-100A (Auto contact system)
1. Introduction
  CMT-100S 와 CMT-100MP는 수동레버식 접촉시스템으로 160X160mmm(100S) 또는 220X220mm(100MP) stage에 시료를 올려놓고, 버튼하나로 간편하게 고정밀 4탐침을 이용하여 면저항을 측정하고 LCD창을 이용하여 측정결과를 ohm/sq단위로 바로 알 수 있습니다.
CMT-100A는 Motor를 장착하여 버튼하나로 Contact과 측정을 자동으로 합니다.
PC와 연결하면 전용S/W를 이용하여 측정결과를 순차적으로 내려 받을 수 있습니다.
 
2. Features  
Lever type contact system  
Automatic range selection    
USB port & software    
3. Configuration    
  The system consists of the following components.    
High precision 4-point probe head    
Lever type Z-axis arm    
Membrane keyboard panel    
LCD display window    
USB port for data download    
Data download Software    
Standard accessories    
  - Power connection cable
- Data communication cable
- Operating & service manual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe(Input thickness)
- Measuring range : 10.0 μOhm·cm ∼ 200.0 kOhm·cm(VLSI standard wafer)
- Measuring point : Center 1 point
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ±0.5 % (Precision resistor)    
Jandel 4-point probe (100S는 시그나톤probe)    
  - Pin spacing : 20 mils∼ 50 mils
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron
Software    
  - Windows Version
- Data save & load
- Data export by Excel format & printout
- Use USB port
5. Specimen    
max 160X160mm(100S) 220×220 mm(100MP)    
6. Measuring time    
Approx. 2 ± 1 sec/point    
7. Software
Data download PC : IBM PC/AT compatible(option)
Connect USB port of PC and CMT-100S/MP
Data save & load
Data printout
8. Utility requirement    
Power requirements    
  - Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz
9. Outside dimension    
210X380X230mm(100S)/254X562X350mm(100MP)    
10. Operating environment
Temperature range : 23°± 1°C
Relative humidity : 30 % ∼ 70 %
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.
 
     
   
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