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  CMT-SR2000N / CMT-SR2500 (for 200mm wafer / Solar cell)
1. Introduction  
  CMT-SR2000N과 CMT-SR2500은 단독운영은 물론, PC와 전용 S/W를 이용하여 정확한 보정계수를 적용하여, 최대 200mm wafer 또는 156X156mm Solar cell 의 면저항(ohm/sq)을 자동으로 이동하며 측정하고, 2D 또는 3D로 측정결과 분석이 가능한 다기능의 면저항측정기 입니다.  
2. Features  
XYZ-axis fully automatic system  
High precision JANDEL 4-point probe head  
Auto/Manual range selection  
Systems for 200mm wafer (SR2500 for 156X156mm)  
Built-in temp sensor for temp coefficient  
Perfect remote control by operating PC  
Data analysis (2D, 3Dmap etc)    
ASTM & SEMI quick measurement mode    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head unit    
Z-axis robot arm    
Revolution sample stage chuck (XY-axis)    
Membrane keyboard panel    
LCD display window    
Remote control communication port    
Vacuum hose connector (200mmHg)    
Software (Windows Ver.)    
Standard accessories    
  - Operating PC
- Power cable & USB cable for remote control
- AIT reference 3" wafer
- Operating & service maual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ± 0.5 %(Precision resistor)    
JANDEL 4-point probe    
  - Pin spacing : 25 mils ∼ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : Data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data : Data export by Excel format & printout
Measurement mode (S/W)    
  -Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI Mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key
5. Specimen    
Wafer : max 200mm (SR2500 : 156X156mm)    
6. Measuring time    
Approx. 2 ± 1 sec/point    
7. Software [Windows Ver.]
Operating personal computer : IBM PC/AT compatible
USB communication
8. Utility requirements    
Power Requirements (1 Line)    
  - Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz

   
Stage Chuck Vacuum Requirements (1 Line)    
  - Vacuum : About 200mmHg
- Vacuum hose : Urethane 4mm
   
9. Outside Dimension    
SR2000N : 254mm(W)×562mm(D)×250mm(H) SR2500 : 270mm(W)×610mm(D)×280mm(H)    
10. Operating environment    
Temperature range : 23° ± 1°C    
Relative humidity : 30 ∼ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
       
 
 
     
   
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