| 1. Introduction |
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CMT-SR2000N은 단독운영은 물론, PC와 전용 S/W를 이용하여 정확한 보정계수를 적용하여, 최대 200mm wafer 또는 140X140mm 사각샘플의 면저항(ohm/sq)을 자동으로 이동하며 측정하고, 2D 또는 3D로 측정결과 분석이 가능한 다기능의 면저항측정기 입니다. |
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| 2. Features |
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XYZ-axis fully automatic system |
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High precision JANDEL 4-point probe head |
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Auto/Manual range selection |
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Systems for 200mm wafer |
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Built-in temp sensor for temp coefficient |
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Perfect remote control by operating PC |
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Data analysis (2D, 3Dmap etc) |
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ASTM & SEMI quick measurement mode |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head unit |
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Z-axis robot arm |
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Revolution sample stage chuck (XY-axis) |
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Membrane keyboard panel |
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LCD display window |
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Remote control communication port |
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Vacuum hose connector (200mmHg) |
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Software (Windows Ver.) |
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Standard accessories |
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- Operating PC
- Power cable & USB cable for remote control
- AIT reference 3" or 4" wafer
- Operating & service maual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
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Resistivity measurement |
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- Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ± 0.5 %(Precision resistor) |
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JANDEL 4-point probe |
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- Pin spacing : 25 mils ∼ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
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Operating software |
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- Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : Data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data : Data export by Excel format & printout
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Measurement mode (S/W) |
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-Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI Mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key |
| 5. Specimen |
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Max 8"Wafer or 140x140mm sample |
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| 6. Measuring time |
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Approx. 2 ± 1 sec/point |
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| 7. Software
[Windows Ver.] |
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Operating personal computer : Intel CPU, Windows OS |
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USB communication |
| 8. Utility requirements |
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Power Requirements (1 Line) |
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- Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz
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Stage Chuck Vacuum Requirements (1 Line) |
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- Vacuum : About 200mmHg
- Vacuum hose : Urethane 4mm
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| 9. Outside Dimension |
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254mm(W)×562mm(D)×250mm(H) |
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| 10. Operating environment |
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Temperature range : 23° ± 1°C |
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Relative humidity : 30 ∼ 70 % |
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Avoid placing the system near a source
of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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CMT-SR2000N for 8" wafer or 140x140mm 