English  
 
 
 
 
  Home >Á¦Ç°¼Ò°³> SR2000N / SR2500 / SR2500N  
 
  CMT-SR2000N / CMT-SR2500 (for 200mm wafer / Solar cell)
1. Introduction  
  CMT-SR2000N°ú CMT-SR2500½Ã¸®Áî´Â ´Üµ¶¿î¿µÀº ¹°·Ð, PC¿Í Àü¿ë S/W¸¦ ÀÌ¿ëÇÏ¿© Á¤È®ÇÑ º¸Á¤°è¼ö¸¦ Àû¿ëÇÏ¿©, ÃÖ´ë 200mm wafer ¶Ç´Â 182X182mm(M10) Solar cell ÀÇ ¸éÀúÇ×(ohm/sq)À» ÀÚµ¿À¸·Î À̵¿Çϸç ÃøÁ¤ÇÏ°í, 2D ¶Ç´Â 3D·Î ÃøÁ¤°á°ú ºÐ¼®ÀÌ °¡´ÉÇÑ ´Ù±â´ÉÀÇ ¸éÀúÇ×ÃøÁ¤±â ÀÔ´Ï´Ù.  
2. Features  
XYZ-axis fully automatic system  
High precision JANDEL 4-point probe head  
Auto/Manual range selection  
Systems for 200mm wafer(CMT-SR2000N)  
Systems for 156X156mm(M2)(CMT-SR2500)  
Systems for 182X182mm(M10)(CMT-SR2500N)  
Systems for 210X210mm(M12)(CMT-SR5000)  
Built-in temp sensor for temp coefficient  
Perfect remote control by operating PC  
Data analysis (2D, 3Dmap etc)    
ASTM & SEMI quick measurement mode    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head unit    
Z-axis robot arm    
Revolution sample stage chuck (XY-axis)    
Membrane keyboard panel    
LCD display window    
Remote control communication port    
Vacuum hose connector (200mmHg)    
Software (Windows Ver.)    
Standard accessories    
  - Operating PC
- Power cable & USB cable for remote control
- AIT reference 3" or 4" wafer
- Operating & service maual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ¡­ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 ¥ìohm¡¤cm ¡­ 200.0 kohm¡¤cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ¡¾ 0.5 %(Precision resistor)    
JANDEL 4-point probe    
  - Pin spacing : 25 mils ¡­ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ¡­ 250 gram/pin
- Pin radius : 12.5 micron¡­500 micron (polished 2¥ì diamond)
- Tolerance : ¡¾ 0.01 mm
- Needles : Solid Tungsten Carbide ¥õ0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : Data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data : Data export by Excel format & printout
Measurement mode (S/W)    
  -Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI Mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key
5. Specimen    
Wafer or Solar cell    
6. Measuring time    
Approx. 2 ¡¾ 1 sec/point    
7. Software [Windows Ver.]
Operating personal computer : Intel CPU, Windows OS
USB communication
8. Utility requirements    
Power Requirements (1 Line)    
  - Line voltage : AC 220V ¡¾ 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz

   
Stage Chuck Vacuum Requirements (1 Line)    
  - Vacuum : About 200mmHg
- Vacuum hose : Urethane 4mm
   
9. Outside Dimension    
SR2000N : 254mm(W)¡¿562mm(D)¡¿250mm(H) SR2500 : 270mm(W)¡¿610mm(D)¡¿280mm(H)    
10. Operating environment    
Temperature range : 23¡Æ ¡¾ 1¡ÆC    
Relative humidity : 30 ¡­ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
       
 
 
     
   
Copyright (c) 2004 AIT Co.,Ltd. All rights reserved.
16681 °æ±âµµ ¼ö¿ø½Ã ¿µÅ뱸 ½Å¿ø·Î88, µðÁöÅп¥ÆÄÀ̾î2, 103µ¿407È£ | Tel 031-695-7166