| 1. Introduction |
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- Automatic glass loader & unloader 면저항측정기
- AGV, MGV 대응 Cassette 단위 자동 측정시스템
- 측정 Data의 관리 및 Host 통신
- Cassette 및 Glass aligning 장치
- Pork type Glass 이송장치
- Clean room 대응
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| 2. Configuration |
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- 4-Point probe Head
- Bridge type XY-axis robot
- Maximum measurement is 600 mm x 720 mm.
- Pork type glass handler
- Elevation cassette stage
- Glass align system on sample stage
- Cassette align system on cassette stage
- Cassette mapping
- Glass sensor (Glass slot checker)
- Power key switch
- Emergency button
- Operating signal lamp
- Operating & analysis software
- Operating PC & Color inkjet printer
- PC rack
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| 3. Measuring specification |
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- Sheet resistance measurement range : 1 mohm/sq ~ 2Mohm/sq
- Current source : 10nA ~ 100mA / DVM 0 ~ 2,000mV
- Measurement accuracy : 土 0.5%
- Position repeatability : 土 100um |
| 4. Operating Software |
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- Measurement mode : Auto / Standard / Recipe / Manual
- Data save / Sample type save
- Data analysis : 2D / 3D / Data map etc.
- Data & mapping print out
- NFS(standard) or SECSII(option) application
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| 5. Measuring time |
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- Approx 3 土 1 sec/point |
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| 6. Measuring Flow |
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a. Power on
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b. Execution operating software
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c. Creation measurement condition
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d. Cassette loading (by AGV or MGV) *
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e. Cassette align
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f. Cassette bar-code reading *
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g. Cassette slot checking
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h. Measure start
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i. Cassette elevation & glass loading
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j. Glass veri-code reading *
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k. Glass align on sample stage
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l. Measuring
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m. Saving data
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n. Glass unloading & cassette elevation
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o. Measurement finish
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- 같은 Cassette에서 연속적인 Glass측정은 i. → n. 과정을 반복.
- * 표시가 있는 부분은 발주사 사양에 의함. |
| 7. Operating environment |
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- Temperature range : 23 土 1℃
- Relative humidity : 30 % ~ 70%
- Avoid placing the system near a source of RFI, vibration and sources of gas
- Avoid large changes in temperature |
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CMT-SR3000LA (판매중지-20230814) 