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  CMT-SR3000LA (In-line system)
1. Introduction  
- Automatic glass loader & unloader 면저항측정기
- AGV, MGV 대응 Cassette 단위 자동 측정시스템
- 측정 Data의 관리 및 Host 통신
- Cassette 및 Glass aligning 장치
- Pork type Glass 이송장치
- Clean room 대응
 
2. Configuration  
  - 4-Point probe Head
- Bridge type XY-axis robot
- Maximum measurement is 600 mm x 720 mm.
- Pork type glass handler
- Elevation cassette stage
- Glass align system on sample stage
- Cassette align system on cassette stage
- Cassette mapping
- Glass sensor (Glass slot checker)
- Power key switch
- Emergency button
- Operating signal lamp
- Operating & analysis software
- Operating PC & Color inkjet printer
- PC rack
 
3. Measuring specification    
  - Sheet resistance measurement range : 1 mohm/sq ~ 2Mohm/sq
- Current source : 10nA ~ 100mA / DVM 0 ~ 2,000mV
- Measurement accuracy : 土 0.5%

- Position repeatability : 土 100um
4. Operating Software    
  - Measurement mode : Auto / Standard / Recipe / Manual
- Data save / Sample type save
- Data analysis : 2D / 3D / Data map etc.
- Data & mapping print out
- NFS(standard) or SECSII(option) application
5. Measuring time    
  - Approx 3 土 1 sec/point    
6. Measuring Flow    
  a. Power on

b. Execution operating software

c. Creation measurement condition

d. Cassette loading (by AGV or MGV) *

e. Cassette align

f. Cassette bar-code reading *

g. Cassette slot checking

h. Measure start

i. Cassette elevation & glass loading

j. Glass veri-code reading *

k. Glass align on sample stage

l. Measuring

m. Saving data

n. Glass unloading & cassette elevation

o. Measurement finish
   
  - 같은 Cassette에서 연속적인 Glass측정은 i. → n. 과정을 반복.
- * 표시가 있는 부분은 발주사 사양에 의함.
7. Operating environment    
  - Temperature range : 23 土 1℃
- Relative humidity : 30 % ~ 70%
- Avoid placing the system near a source of RFI, vibration and sources of gas
- Avoid large changes in temperature
       
 
 
     
   
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