1. Introduction |
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- Automatic glass loader & unloader ¸éÀúÇ×ÃøÁ¤±â
- AGV, MGV ´ëÀÀ Cassette ´ÜÀ§ ÀÚµ¿ ÃøÁ¤½Ã½ºÅÛ
- ÃøÁ¤ DataÀÇ °ü¸® ¹× Host Åë½Å
- Cassette ¹× Glass aligning ÀåÄ¡
- Pork type Glass À̼ÛÀåÄ¡
- Clean room ´ëÀÀ
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2. Configuration |
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- 4-Point probe Head
- Bridge type XY-axis robot
- Maximum measurement is 600 mm x 720 mm.
- Pork type glass handler
- Elevation cassette stage
- Glass align system on sample stage
- Cassette align system on cassette stage
- Cassette mapping
- Glass sensor (Glass slot checker)
- Power key switch
- Emergency button
- Operating signal lamp
- Operating & analysis software
- Operating PC & Color inkjet printer
- PC rack
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3. Measuring specification |
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- Sheet resistance measurement range : 1 mohm/sq ~ 2Mohm/sq
- Current source : 10nA ~ 100mA / DVM 0 ~ 2,000mV
- Measurement accuracy : ÷Ï 0.5%
- Position repeatability : ÷Ï 100um |
4. Operating Software |
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- Measurement mode : Auto / Standard / Recipe / Manual
- Data save / Sample type save
- Data analysis : 2D / 3D / Data map etc.
- Data & mapping print out
- NFS(standard) or SECSII(option) application
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5. Measuring time |
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- Approx 3 ÷Ï 1 sec/point |
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6. Measuring Flow |
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a. Power on
¡é
b. Execution operating software
¡é
c. Creation measurement condition
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d. Cassette loading (by AGV or MGV) *
¡é
e. Cassette align
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f. Cassette bar-code reading *
¡é
g. Cassette slot checking
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h. Measure start
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i. Cassette elevation & glass loading
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j. Glass veri-code reading *
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k. Glass align on sample stage
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l. Measuring
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m. Saving data
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n. Glass unloading & cassette elevation
¡é
o. Measurement finish
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- °°Àº Cassette¿¡¼ ¿¬¼ÓÀûÀÎ GlassÃøÁ¤Àº i. ¡æ n. °úÁ¤À» ¹Ýº¹.
- * Ç¥½Ã°¡ ÀÖ´Â ºÎºÐÀº ¹ßÁÖ»ç »ç¾ç¿¡ ÀÇÇÔ. |
7. Operating environment |
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- Temperature range : 23 ÷Ï 1¡É
- Relative humidity : 30 % ~ 70%
- Avoid placing the system near a source of RFI, vibration and sources of gas
- Avoid large changes in temperature |
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