| 1. Introduction |
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CMT-SR5000은 Current source와 Probe contact system일체형으로, 단독측정은 물론 PC와 전용 S/W를 이용하여 자동으로 측정하고 2D 및 3D로 분석가능합니다. |
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| 2. Features |
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XYZ-axis fully automatic system |
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High precision JANDEL 4-point probe head |
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Automatic range selection |
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Systems for 10"~20" wafer or 182x182mm ~ 360x360mm |
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Built-in temp sensor for temp coefficient |
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Perfect remote control by operating software |
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Data analysis. (2D, 3D mapping / Data map etc.) |
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ASTM, SEMI measurement mode |
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High precision movement |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head unit |
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XYZ-axis robot arm |
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Remote control communication USB port |
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Membrane keyboard panel & LCD display window |
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Power switch in Front panel |
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Operating & analysis software |
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Vacuum hose connector |
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Standard accessories |
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- Operating PC
- Power cable & USB cable for Remote control
- AIT reference 3" or 4" wafer
- Operating & service manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq |
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Resistivity measurement |
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- Measuring method : Contacted by
4-point probe (input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 %(Precision resistor) |
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JANDEL 4-point probe |
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- Pin spacing : 25 mils ∼ 50 mils by 5mil
increments
- Pin Load : 10 gram ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm |
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Operating software |
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- Measurement condition creation : Wafer type,
measure point interval, test mode, etc.
- Save & load : Data, wafer type, measure point
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout
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Measurement mode (S/W) |
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- Auto measurement : Point interval
designation by user
- Quick measurement : ASTM, SEMI Mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow
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| 5. Specimen |
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CMT-SR5000(10) : max 10" or 182x182mm(M10) |
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CMT-SR5000(12) : max 12" or 210x210mm(M12) |
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CMT-SR5000(18) : max 18" or 315x315mm |
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CMT-SR5000(20) : max 20" or 360x360mm |
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| 6. Measuring
time |
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- Approx. 2 ± 1 sec / point |
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| 7. Software
(Windows Ver.) |
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Operating personal computer : Intel CPU, Windows OS |
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USB communication |
| 8. Utility
requirements |
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Power requirements |
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- Line voltage : AC 220V ± 10%
- Electric power : 100 W, 500 mA
- Line frequency : 60 Hz
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Process vacuum |
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- Size : 4mm
- Press : 200mmHg
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| 9. Outside
Dimension |
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300mm system:580mm(W)×700mm(D)×430mm(H) |
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| 10. Operating
environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ∼ 70 % |
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Avoid placing the system near a source
of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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CMT-SR5000 (System for 10~20"wafer & M10/M12 Solar cell)