1. Introduction |
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CMT-SR5000Àº Current source¿Í Probe contact systemÀÏüÇüÀ¸·Î, ´Üµ¶ÃøÁ¤Àº ¹°·Ð PC¿Í Àü¿ë S/W¸¦ ÀÌ¿ëÇÏ¿© ÀÚµ¿À¸·Î ÃøÁ¤ÇÏ°í 2D ¹× 3D·Î ºÐ¼®°¡´ÉÇÕ´Ï´Ù. |
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2. Features |
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XYZ-axis fully automatic system |
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High precision JANDEL 4-point probe head |
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Automatic range selection |
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Systems for 12"/18"/20" wafer or 210x210~360x360mm |
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Built-in temp sensor for temp coefficient |
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Perfect remote control by operating software |
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Data analysis. (2D, 3D mapping / Data map etc.) |
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ASTM, SEMI measurement mode |
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High precision movement |
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3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head unit |
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XYZ-axis robot arm |
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Remote control communication USB port |
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Membrane keyboard panel & LCD display window |
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Power switch in Front panel |
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Operating & analysis software |
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Vacuum hose connector |
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Standard accessories |
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- Operating PC
- Power cable & USB cable for Remote control
- AIT reference 3" or 4" wafer
- Operating & service manual
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4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ¡ 2 Mohm/sq |
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Resistivity measurement |
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- Measuring method : Contacted by
4-point probe (input thickness)
- Measuring range : 10.0 ¥ìohm¡¤cm ¡ 200.0 kohm¡¤cm |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ¡¾0.5 %(Precision resistor) |
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JANDEL 4-point probe |
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- Pin spacing : 25 mils ¡ 50 mils by 5mil
increments
- Pin Load : 10 gram ¡ 250 gram/pin
- Pin radius : 12.5 micron¡500 micron (polished 2¥ì diamond)
- Tolerance : ¡¾ 0.01 mm
- Needles : Solid Tungsten Carbide ¥õ0.40 mm |
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Operating software |
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- Measurement condition creation : Wafer type,
measure point interval, test mode, etc.
- Save & load : Data, wafer type, measure point
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout
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Measurement mode (S/W) |
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- Auto measurement : Point interval
designation by user
- Quick measurement : ASTM, SEMI Mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow
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5. Specimen |
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CMT-SR5000(12) : max 12" or 210x210mm(M12) |
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CMT-SR5000(18) : max 18" or 315x315mm |
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CMT-SR5000(20) : max 20" or 360x360mm |
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6. Measuring
time |
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- Approx. 2 ¡¾ 1 sec / point |
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7. Software
(Windows Ver.) |
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Operating personal computer : Intel CPU, Windows OS |
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USB communication |
8. Utility
requirements |
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Power requirements |
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- Line voltage : AC 220V ¡¾ 10%
- Electric power : 100 W, 500 mA
- Line frequency : 60 Hz
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Process vacuum |
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- Size : 4mm
- Press : 200mmHg
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9. Outside
Dimension |
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300mm system:580mm(W)¡¿700mm(D)¡¿430mm(H) |
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10. Operating
environment |
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Temperature range : 23¡Æ¡¾ 1¡ÆC |
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Relative humidity : 30 % ¡ 70 % |
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Avoid placing the system near a source
of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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