| 1. Introduction |
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The CMT-SR5000 is a high precision system equipped to measure the Sheet Resistance and Resistivity of Silicon Wafer and Solar cell.
This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses mapping and etc. |
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| 2. Features |
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X,Y,Z-axis fully automatic system |
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Automatic range selection |
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Systems for max 300mm(M12 Solar cell)/450mm wafer |
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Perfect remote control by operating software |
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Data analysis (2D, 3D mapping /
Data map / Trend chart, etc.) |
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ASTM, SEMI measurement mode |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head |
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X,Y,Z-axis robot arm |
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300mm(M12)/ 450mm sample stage chuck |
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Remote control communication port |
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Power switch |
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Operating & Analysis Software |
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Vacuum hose connector |
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Standard accessories |
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- Power cable
- Remote control communication cable
- Operating manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq |
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Resistivity measurement |
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- Measuring method : Contacted by
4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 % (Precision resistor) |
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4-point probe (Jandel Eng.) |
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- Pin spacing : 25 mils ∼ 50 mils by 5mil increments.
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm |
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Operating software |
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- Measurement condition creation : Wafer type, measure point interval, test mode, etc.
- Save & load : Data, wafer type, measure point
- Data analysis : 2D, 3D mapping, Data map etc.
- Data & mapping printout
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Measurement mode (S/W) |
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- Auto measurement : Point interval designation by user
- Quick measurement : ASTM, SEMI mode
- Point measurement : Appointment on wafer by mouse.
- Manual measurement : Appointment on wafer by arrow key |
| 5. Specimen |
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- Wafer : max 300mm / 450mm |
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- Solar cell : max 210 X 210mm(M12) |
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| 6. Measuring
time |
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- Approx. 2 ± 1 sec / point |
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| 7. Software
(Windows ver.) |
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Operating personal computer : IBM
PC/AT Compatible Pentium PC |
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communication port |
| 8. Utility
requirements |
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Power requirements |
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- Line voltage : AC 100 ~ 220V ± 10%
- Electric power : 100 W, 500 mA
- Line frequency : 60 Hz
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Compressed Dry Air (for 450mm system) |
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- Size : 6mm Φ
- Press : 5kg/㎠
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Process Vacuum |
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- Size : 4mm Φ
- Press : 500 Torr
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| 9. Outside
Dimension |
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300mm system : 580mm(W) × 700mm(D) × 430mm(H)
450mm system : 610mm(W) × 770mm(D) × 430mm(H) |
| 10. Operating
environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ∼ 70 % |
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Avoid placing the system near a source
of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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CMT-SR5000 Series(for 300mm(M12)/450mm wafer)