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  CMT-SR5000 (for 300/450mm wafer)
1. Introduction
  The CMT-SR5000 is a high precision system equipped to measure the Sheet Resistance and Resistivity of Silicon Wafer and Solar cell. This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses mapping and etc.  
2. Features  
X,Y,Z-axis fully automatic system  
Automatic range selection  
Systems for max 300/450mm wafer and Solar cell  
Perfect remote control by operating software  
Data analysis (2D, 3D mapping / Data map / Trend chart, etc.)
ASTM, SEMI measurement mode    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head    
X,Y,Z-axis robot arm    
300 / 450mm sample stage chuck    
Remote control communication port    
Power switch    
Personal computer (Pentium PC)    
Operating & Analysis Software    
Vacuum hose connector    
Standard accessories    
  - Power cable
- Remote control communication cable
- Operating manual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ±0.5 % (Precision resistor)    
4-point probe (Jandel Eng.)    
  - Pin spacing : 25 mils ∼ 50 mils by 5mil increments.
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, test mode, etc.
- Save & load : Data, wafer type, measure point
- Data analysis : 2D, 3D mapping, Data map etc.
- Data & mapping printout
   
Measurement mode (S/W)    
  - Auto measurement : Point interval designation by user
- Quick measurement : ASTM, SEMI mode
- Point measurement : Appointment on wafer by mouse.
- Manual measurement : Appointment on wafer by arrow key
5. Specimen    
  - Wafer : max 300 / 450mm
  - Solar cell : max 210 X 210mm    
6. Measuring time    
  - Approx. 2 ± 1 sec / point    
7. Software (Windows ver.)
Operating personal computer : IBM PC/AT Compatible Pentium PC
communication port
8. Utility requirements    
Power requirements    
  - Line voltage : AC 100 ~ 220V ± 10%
- Electric power : 100 W, 500 mA
- Line frequency : 60 Hz
   
Compressed Dry Air (for 450mm system)    
  - Size : 6mm Φ
- Press : 5kg/㎠
   
Process Vacuum    
  - Size : 4mm Φ
- Press : 500 Torr
   
9. Outside Dimension    
300mm system : 580mm(W) × 700mm(D) × 430mm(H)
450mm system : 610mm(W) × 770mm(D) × 430mm(H)
10. Operating environment    
Temperature range : 23°± 1°C    
Relative humidity : 30 % ∼ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
       
 
 
     
   
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