| 1. Introduction |
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CMT-SR1000N은 Current source와 Probe contact system일체형으로, 중앙1점을 고정밀 JANDEL 4탐침을 이용하여 면저항을 자동으로 측정하고 LCD창을 이용하여 측정결과를 ohm/sq단위로 바로 알 수 있습니다.
PC와 연결하면 전용S/W를 이용하여 측정결과를 순차적으로 내려 받을 수 있습니다.
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| 2. Features |
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Automatic contact system |
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Automatic range selection |
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Data communication port & software |
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| 3. Configuration |
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The system consists of the following components |
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JANDEL 4-point probe head unit |
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Z-axis robot arm |
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Membrane keyboard panel |
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LCD display window |
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USB port for data download |
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Data download Software |
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Standard accessories |
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- Power connection cable
- Data communication cable
- Operating & service manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point
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Resistivity measurement |
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- Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm (VLSI standard wafer)
- Measuring point : Center 1 point |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 %(Precision resistor) |
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JANDEL 4-point probe |
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- Pin spacing : 20 mils ∼ 50 mils
- Pin load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron |
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Software |
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- Windows Version
- Data save & load
- Data export by Excel format & printout
- Use USB port
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| 5. Specimen |
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Circle type : max 200mm |
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Rectangular type : max 140 mm × 140 mm |
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| 6. Measuring
time |
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Approx. 2 ± 1 sec/point |
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| 7. Software |
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Operating personal computer : IBM
PC/AT compatible |
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Connect USB port of PC and CMT-SR1000N |
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Data save & load |
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Data printout |
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| 8. Utility requirement |
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Power requirements |
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- Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz
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| 9. Outside dimension |
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254mm(W) × 562mm(D) × 250mm(H) |
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| 10. Operating environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ∼ 70 % |
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Avoid placing the system near a source of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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CMT-SR1000N (Auto contact system) 