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  CMT-SR1000N (Auto contact system)
1. Introduction  
  CMT-SR1000N은 Current source와 Probe contact system일체형으로, 중앙1점을 고정밀 JANDEL 4탐침을 이용하여 면저항을 자동으로 측정하고 LCD창을 이용하여 측정결과를 ohm/sq단위로 바로 알 수 있습니다.
PC와 연결하면 전용S/W를 이용하여 측정결과를 순차적으로 내려 받을 수 있습니다.
 
2. Features  
Automatic contact system  
Automatic range selection    
Data communication port & software    
3. Configuration    
The system consists of the following components    
JANDEL 4-point probe head unit    
Z-axis robot arm    
Membrane keyboard panel    
LCD display window    
USB port for data download    
Data download Software    
Standard accessories    
- Power connection cable
- Data communication cable
- Operating & service manual
   
4. Specifications    
Sheet resistance measurement    
- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point
   
Resistivity measurement    
- Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm (VLSI standard wafer)
- Measuring point : Center 1 point
Current source    
- 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
- ±0.5 %(Precision resistor)    
JANDEL 4-point probe    
- Pin spacing : 20 mils ∼ 50 mils
- Pin load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron
   
Software    
- Windows Version
- Data save & load
- Data export by Excel format & printout
- Use USB port
   
5. Specimen    
Circle type : max 200mm    
Rectangular type : max 140 mm × 140 mm    
6. Measuring time    
Approx. 2 ± 1 sec/point    
7. Software    
Operating personal computer : IBM PC/AT compatible
Connect USB port of PC and CMT-SR1000N
Data save & load    
Data printout    
8. Utility requirement    
Power requirements    
- Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz
   
9. Outside dimension    
254mm(W) × 562mm(D) × 250mm(H)    
10. Operating environment    
Temperature range : 23°± 1°C    
Relative humidity : 30 % ∼ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    
   
 
 
     
   
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