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  CMT-SR3000 (Auto mapping system for large area)
1. Introduction
  CMT-SR3000은 LCD, ITO, Touch panel,OLED와 같은 사각 Glass 또는 Film형태 시료의 면저항을 자동측정하기 위한 모델로 PC를 이용하여 구동하고 분석(2D,3D)하며, Glass centering 장치와 Unloading pin을 이용하여 시료를 안전하게 Handling할 수 있습니다.
 
2. Features  
XYZ-axis fully automatic system    
High precision JANDEL 4-point probe head    
Automatic range selection    
Perfect remote control by operating software    
Data analysis.(2D, 3D mapping /data map etc.)
Glass centering nob or Film holding bar    
Glass unload positioning    
3. Configuration    
  The system consists of the following components.    
JANDEL 4-point probe head unit    
Bridge type XYZ-axis robot    
Sample stage for flat panel or film    
LED for process signal    
Remote control communication port    
Power switch    
Operating & analysis software    
Standard accessories    
  - Operating PC
- Power & Remote control communication cable
- AIT reference wafer & Operating manual
   
4. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe(Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ±0.5 %(Precision resistor)    
JANDEL 4-point probe    
  - Pin spacing : 25 mils∼ 50 mils by 5mil increment
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
Operating software    
  - Measurement condition creation : Sample size, measure point interval, test mode, etc.
- Save & load : Data, sample type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- Data & mapping printout
Measurement mode (S/W)    
  - Auto measurement : point interval designation by user
- Quick measurement : 9, 13, 25 pattern quick mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow key
5. Specimen    
  - Rectangle type sample size : Order made    
6. Measuring time    
  - Approx. 2 ± 1 sec/point    
7. Software (Windows Ver.)
Operating personal computer : IBM PC/AT Compatible
Serial communication (RS232C)
8. Utility requirement    
Power requirements    
  - Line voltage : AC 220V ±10%
- Electric power : 100 W, 500 mA
- Line frequency : 50 Hz
   
Air requirements    
  - Air 1 Line : 1,500mmHg (6mm)    
System table    
9. Outside Dimensions    
SR3000S (370X470) : 650mm(W) × 900mm(D) ×350mm(H)
SR3000M (550X650) : 700mm(W) × 950mm(D) ×350mm(H)
SR3000L (600X720) : 800mm(W) ×1050mm(D) ×350mm(H)
SR3000C : Customer size
10. Operating environment    
Temperature range : 23°± 1°C    
Relative humidity : 30 % ~ 70 %    
  - Avoid placing the system near a source of RFI, vibration and sources of gas.
- Avoid large changes in temperature.
       
 
 
     
   
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