| 1. Introduction |
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CMT-SR3000은 LCD, ITO, Touch panel,OLED와 같은
사각 Glass 또는 Film형태 시료의 면저항을 자동측정하기 위한
모델로 PC를 이용하여 구동하고 분석(2D,3D)하며,
Glass centering 장치와 Unloading pin을 이용하여 시료를 안전하게
Handling할 수 있습니다.
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| 2. Features |
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XYZ-axis fully automatic system |
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High precision JANDEL 4-point probe head |
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Automatic range selection |
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Perfect remote control by operating
software |
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Data analysis.(2D, 3D mapping /data map etc.) |
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Glass centering nob or Film holding bar |
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Glass unload positioning |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head unit |
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Bridge type XYZ-axis robot |
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Sample stage for flat panel or film |
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LED for process signal |
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Remote control communication port |
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Power switch |
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Operating & analysis software
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Standard accessories |
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- Operating PC
- Power & Remote control communication cable
- AIT reference wafer & Operating manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by
4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
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Resistivity measurement |
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- Measuring method : Contacted by
4-point probe(Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 %(Precision resistor) |
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JANDEL 4-point probe |
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- Pin spacing : 25 mils∼ 50 mils by 5mil
increment
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm |
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Operating software |
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- Measurement condition creation :
Sample size, measure point interval, test mode,
etc.
- Save & load : Data, sample type, measure point,
etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- Data & mapping printout |
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Measurement mode (S/W) |
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- Auto measurement : point interval
designation by user
- Quick measurement : 9, 13, 25 pattern quick mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow
key |
| 5. Specimen |
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- Rectangle type sample size : Order made |
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| 6. Measuring
time |
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- Approx. 2 ± 1 sec/point |
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| 7. Software
(Windows Ver.) |
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Operating personal computer : IBM
PC/AT Compatible |
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Serial communication (RS232C) |
| 8. Utility
requirement |
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Power requirements |
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- Line voltage : AC 220V ±10%
- Electric power : 100 W, 500 mA
- Line frequency : 50 Hz
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Air requirements |
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- Air 1 Line : 1,500mmHg (6mm) |
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System table |
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| 9. Outside
Dimensions |
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SR3000S (370X470) : 650mm(W) × 900mm(D)
×350mm(H) |
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SR3000M (550X650) : 700mm(W) × 950mm(D)
×350mm(H) |
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SR3000L (600X720) : 800mm(W) ×1050mm(D)
×350mm(H) |
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SR3000C : Customer size |
| 10. Operating
environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ~ 70 % |
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- Avoid placing the system near a
source of RFI, vibration and sources of gas.
- Avoid large changes in temperature. |
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CMT-SR3000 (판매중지-20230814) 