| 1. Introduction |
 |
| |
CMT-SR3000은 LCD, ITO, Touch panel,OLED와 같은
사각 Glass 또는 Film형태 시료의 면저항을 자동측정하기 위한
모델로 PC를 이용하여 구동하고 분석(2D,3D)하며,
Glass centering 장치와 Unloading pin을 이용하여 시료를 안전하게
Handling할 수 있습니다.
|
|
| 2. Features |
|
 |
XYZ-axis fully automatic system |
|
|
|
High precision JANDEL 4-point probe head |
|
|
|
Automatic range selection |
|
|
|
Perfect remote control by operating
software |
|
|
|
Data analysis.(2D, 3D mapping /data map etc.) |
|
Glass centering nob or Film holding bar |
|
|
|
Glass unload positioning |
|
|
| 3. Configuration |
|
|
| |
The system consists of the following components. |
|
|
|
JANDEL 4-point probe head unit |
|
|
|
Bridge type XYZ-axis robot |
|
|
|
Sample stage for flat panel or film |
|
|
|
LED for process signal |
|
|
|
Remote control communication port |
|
|
|
Power switch |
|
|
|
Operating & analysis software
|
|
|
|
Standard accessories |
|
|
| |
- Operating PC
- Power & Remote control communication cable
- AIT reference wafer & Operating manual
|
|
|
| 4. Specifications |
|
|
|
Sheet resistance measurement |
|
|
| |
- Measuring method : Contacted by
4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
|
|
|
|
Resistivity measurement |
|
|
| |
- Measuring method : Contacted by
4-point probe(Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm |
|
Current source |
|
|
| |
- 10nA to 100mA
- DVM 0V to 2,000mV
|
|
|
|
Measurement accuracy |
|
|
| |
- ±0.5 %(Precision resistor) |
|
|
|
JANDEL 4-point probe |
|
|
| |
- Pin spacing : 25 mils∼ 50 mils by 5mil
increment
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm |
|
Operating software |
|
|
| |
- Measurement condition creation :
Sample size, measure point interval, test mode,
etc.
- Save & load : Data, sample type, measure point,
etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- Data & mapping printout |
|
Measurement mode (S/W) |
|
|
| |
- Auto measurement : point interval
designation by user
- Quick measurement : 9, 13, 25 pattern quick mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow
key |
| 5. Specimen |
|
|
| |
- Rectangle type sample size : Order made |
|
|
| 6. Measuring
time |
|
|
| |
- Approx. 2 ± 1 sec/point |
|
|
| 7. Software
(Windows Ver.) |
|
Operating personal computer : IBM
PC/AT Compatible |
|
Serial communication (RS232C) |
| 8. Utility
requirement |
|
|
|
Power requirements |
|
|
| |
- Line voltage : AC 220V ±10%
- Electric power : 100 W, 500 mA
- Line frequency : 50 Hz
|
|
|
|
Air requirements |
|
|
| |
- Air 1 Line : 1,500mmHg (6mm) |
|
|
|
System table |
|
|
| 9. Outside
Dimensions |
|
|
|
SR3000S (370X470) : 650mm(W) × 900mm(D)
×350mm(H) |
|
SR3000M (550X650) : 700mm(W) × 950mm(D)
×350mm(H) |
|
SR3000L (600X720) : 800mm(W) ×1050mm(D)
×350mm(H) |
|
SR3000C : Customer size |
| 10. Operating
environment |
|
|
|
Temperature range : 23°± 1°C |
|
|
|
Relative humidity : 30 % ~ 70 % |
|
|
| |
- Avoid placing the system near a
source of RFI, vibration and sources of gas.
- Avoid large changes in temperature. |
| |
|
|
|
CMT-SR3000 (판매중지-20230814) 